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Spectroscopic study of polysilicon traps by means of fast capacitance transients

dc.contributor.authorToledano Luque, Maria
dc.contributor.authorTang, Baojun
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-21T12:49:04Z
dc.date.available2021-10-21T12:49:04Z
dc.date.issued2013
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23178
dc.sourceIIOimport
dc.titleSpectroscopic study of polysilicon traps by means of fast capacitance transients
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage01A110
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume31
imec.availabilityPublished - imec
imec.internalnotesWODIM 2012 paper


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