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Influence of porosity on dielectric breakdown of ultralow-k dielectrics

dc.contributor.authorVanstreels, Kris
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T13:50:36Z
dc.date.available2021-10-21T13:50:36Z
dc.date.issued2013
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23305
dc.sourceIIOimport
dc.titleInfluence of porosity on dielectric breakdown of ultralow-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.source.peerreviewyes
dc.source.beginpage50604
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue5
dc.source.volume31
imec.availabilityPublished - imec


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