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Chemical analysis of thin films in electronic devices by analytical transmission electron microscopy methodologies

dc.contributor.authorVerleysen, Eveline
dc.date.accessioned2021-10-21T14:09:17Z
dc.date.available2021-10-21T14:09:17Z
dc.date.issued2013-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23339
dc.sourceIIOimport
dc.titleChemical analysis of thin films in electronic devices by analytical transmission electron microscopy methodologies
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.contributor.thesisadvisorSchryvers, D.
imec.availabilityPublished - open access


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