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Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

dc.contributor.authorWan, Ling-Shu
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T14:24:30Z
dc.date.available2021-10-21T14:24:30Z
dc.date.issued2013
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23370
dc.sourceIIOimport
dc.titleDirected self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
dc.typeJournal article
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage06F301
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume31
imec.availabilityPublished - open access
imec.internalnotesPaper IEPBN Conference


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