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On the scalability of doped hafnia thin films

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorSchram, Tom
dc.contributor.authorChew, Soon Aik
dc.contributor.authorWoicik, Joseph C.
dc.contributor.authorBrizzi, Simone
dc.contributor.authorTallarida, Massimo
dc.contributor.authorSchmeisser, Dieter
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorRagnarsson, Lars-Ake
dc.date.accessioned2021-10-22T00:43:06Z
dc.date.available2021-10-22T00:43:06Z
dc.date.issued2014-03
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23469
dc.sourceIIOimport
dc.titleOn the scalability of doped hafnia thin films
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.source.peerreviewyes
dc.source.beginpage122906
dc.source.journalApplied Physics Letters
dc.source.issue12
dc.source.volume104
dc.identifier.urlhttp://dx.doi.org/10.1063/1.4870075
imec.availabilityPublished - imec


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