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Vertical silicon based devices and processes

dc.contributor.authorAugusto, Carlos
dc.date.accessioned2021-09-30T11:25:11Z
dc.date.available2021-09-30T11:25:11Z
dc.date.issued1998-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2349
dc.sourceIIOimport
dc.titleVertical silicon based devices and processes
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
imec.availabilityPublished - imec


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