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Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase

dc.contributor.authorArmini, Silvia
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorSwerts, Johan
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorConard, Thierry
dc.contributor.authorBlauw, Michiel
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T00:44:07Z
dc.date.available2021-10-22T00:44:07Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23504
dc.sourceIIOimport
dc.titlePore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewyes
dc.source.beginpage240
dc.source.endpage245
dc.source.journalMicroelectronic Engineering
dc.source.volume120
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S016793171300590X
imec.availabilityPublished - imec


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