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Design and characterization of a thermally actuated latching MEMS swith for telecommunication applications

dc.contributor.authorDellaert, Dries
dc.contributor.authorDoutreloigne, Jan
dc.date.accessioned2021-10-22T01:13:23Z
dc.date.available2021-10-22T01:13:23Z
dc.date.issued2014
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23746
dc.sourceIIOimport
dc.titleDesign and characterization of a thermally actuated latching MEMS swith for telecommunication applications
dc.typeJournal article
dc.contributor.imecauthorDoutreloigne, Jan
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage75022
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue7
dc.source.volume24
dc.identifier.urlhttp://iopscience.iop.org/0960-1317/24/7/075022
imec.availabilityPublished - open access


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