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Silicone oxidation for a-Si:H passivation of wafers bonded to glass

dc.contributor.authorGranata, Stefano
dc.contributor.authorBearda, Twan
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorAbdulraheem, Yaser
dc.contributor.authorGordon, Ivan
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-22T01:43:36Z
dc.date.available2021-10-22T01:43:36Z
dc.date.issued2014
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23878
dc.sourceIIOimport
dc.titleSilicone oxidation for a-Si:H passivation of wafers bonded to glass
dc.typeJournal article
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage395
dc.source.endpage398
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.issue5
dc.source.volume8
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201409081/abstract
imec.availabilityPublished - imec


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