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Plasma silicone interaction during aSi:H deposition on solar cell wafers bonded to glass

dc.contributor.authorGranata, Stefano
dc.contributor.authorBoulord, Caroline
dc.contributor.authorGovaerts, Jonathan
dc.contributor.authorBearda, Twan
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorSoogund, Deana
dc.contributor.authorVaquer Pérez, Raquel
dc.contributor.authorDross, Frederic
dc.contributor.authorAbdulraheem, Yaser
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-22T01:43:53Z
dc.date.available2021-10-22T01:43:53Z
dc.date.issued2014
dc.identifier.issn0927-0248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23879
dc.sourceIIOimport
dc.titlePlasma silicone interaction during aSi:H deposition on solar cell wafers bonded to glass
dc.typeJournal article
dc.contributor.imecauthorGovaerts, Jonathan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecGovaerts, Jonathan::0000-0002-8908-1198
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage48
dc.source.endpage54
dc.source.journalSolar Energy Materials and Solar Cells
dc.source.volume124
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0927024814000543
imec.availabilityPublished - open access


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