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Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films

dc.contributor.authorJanssen, Wiebke
dc.contributor.authorTurner, Stuart
dc.contributor.authorSakr, Georges
dc.contributor.authorJornard, Francois
dc.contributor.authorBarjon, Julien
dc.contributor.authorDegutis, Giedrius
dc.contributor.authorLu, Ying-Gang
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVerbeeck, Johan
dc.contributor.authorVan Tendeloo, Gustaaf
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T02:18:01Z
dc.date.available2021-10-22T02:18:01Z
dc.date.issued2014
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23999
dc.sourceIIOimport
dc.titleSubstitutional phosphorus incorporation in nanocrystalline CVD diamond thin films
dc.typeJournal article
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.identifier.doi10.1002/pssr.201409235
dc.source.peerreviewyes
dc.source.beginpage705
dc.source.endpage709
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.issue8
dc.source.volume8
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201409235/abstract
imec.availabilityPublished - open access


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