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Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments

dc.contributor.authorJanssens, Stoffel
dc.contributor.authorDrijkoningen, Sien
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T02:18:50Z
dc.date.available2021-10-22T02:18:50Z
dc.date.issued2014
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24002
dc.sourceIIOimport
dc.titleUltra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage-73107
dc.source.journalApplied Physics Letters
dc.source.issue7
dc.source.volume104
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/104/7/10.1063/1.4866028
imec.availabilityPublished - open access


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