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Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches

dc.contributor.authorJiang, Sijia
dc.contributor.authorMerckling, Clement
dc.contributor.authorGuo, Weiming
dc.contributor.authorWaldron, Niamh
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSeefeldt, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-22T02:21:27Z
dc.date.available2021-10-22T02:21:27Z
dc.date.issued2014
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24010
dc.sourceIIOimport
dc.titleEvolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches
dc.typeJournal article
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewyes
dc.source.beginpage23517
dc.source.journalJournal of Applied Physics
dc.source.issue2
dc.source.volume115
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/115/2/10.1063/1.4861416
imec.availabilityPublished - imec


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