Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography
dc.contributor.author | Kambham, Ajay Kumar | |
dc.date.accessioned | 2021-10-22T02:27:11Z | |
dc.date.available | 2021-10-22T02:27:11Z | |
dc.date.issued | 2014-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24028 | |
dc.source | IIOimport | |
dc.title | Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
imec.availability | Published - open access |