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Porous silicon gettering

dc.contributor.authorKuzma Filipek, Izabela
dc.contributor.authorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.date.accessioned2021-10-22T02:47:24Z
dc.date.available2021-10-22T02:47:24Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24088
dc.sourceIIOimport
dc.titlePorous silicon gettering
dc.typeBook chapter
dc.contributor.imecauthorKuzma Filipek, Izabela
dc.contributor.imecauthorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.orcidimecSivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage767
dc.source.bookHandbook of Porous Silicon
dc.source.endpage778
imec.availabilityPublished - open access
imec.internalnotesISBN 978-3-319-05744-6


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