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UV-induced modification of fluorocarbon polymer for improvement of wet removal

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorSimms, Ihsan
dc.contributor.authorYue, Henry
dc.contributor.authorBrown, Ian
dc.contributor.authorKesters, Els
dc.contributor.authorVereecke, Guy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T02:53:25Z
dc.date.available2021-10-22T02:53:25Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24108
dc.sourceIIOimport
dc.titleUV-induced modification of fluorocarbon polymer for improvement of wet removal
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage136
dc.source.endpage140
dc.source.journalMicroelectronic Engineering
dc.source.volume114
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713003419
imec.availabilityPublished - imec


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