dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Simms, Ihsan | |
dc.contributor.author | Yue, Henry | |
dc.contributor.author | Brown, Ian | |
dc.contributor.author | Kesters, Els | |
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-22T02:53:25Z | |
dc.date.available | 2021-10-22T02:53:25Z | |
dc.date.issued | 2014 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24108 | |
dc.source | IIOimport | |
dc.title | UV-induced modification of fluorocarbon polymer for improvement of wet removal | |
dc.type | Journal article | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Kesters, Els | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 136 | |
dc.source.endpage | 140 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 114 | |
dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0167931713003419 | |
imec.availability | Published - imec | |