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Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.

dc.contributor.authorMistrik, J.
dc.contributor.authorJanicek, P.
dc.contributor.authorTaylor, A.
dc.contributor.authorFendrych, F.
dc.contributor.authorFekete, L.
dc.contributor.authorJager, A.
dc.contributor.authorNesladek, Milos
dc.date.accessioned2021-10-22T03:53:01Z
dc.date.available2021-10-22T03:53:01Z
dc.date.issued2014
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24264
dc.sourceIIOimport
dc.titleSpectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage230
dc.source.endpage237
dc.source.journalThin Solid Films
dc.source.volume571
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0040609014010426
imec.availabilityPublished - open access


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