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Low-leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20nm technology node in dynamic random access memory

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorKaczer, Ben
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorRadu, Iuliana
dc.contributor.authorClima, Sergiu
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-22T04:49:47Z
dc.date.available2021-10-22T04:49:47Z
dc.date.issued2014
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24396
dc.sourceIIOimport
dc.titleLow-leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20nm technology node in dynamic random access memory
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage82908
dc.source.journalApplied Physics Letters
dc.source.issue8
dc.source.volume104
dc.identifier.urlhttp://scitation.aip.org/docserver/fulltext/aip/journal/apl/104/8/1.4866860.pdf?expires=1393433532&id=id&accname=guest&checksum=
imec.availabilityPublished - imec


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