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Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion

dc.contributor.authorSagi, K.V.
dc.contributor.authorAmanapu, H.P.
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBabu, S.V.
dc.date.accessioned2021-10-22T05:26:27Z
dc.date.available2021-10-22T05:26:27Z
dc.date.issued2014
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24475
dc.sourceIIOimport
dc.titleInvestigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion
dc.typeJournal article
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewyes
dc.source.beginpageP227
dc.source.endpageP234
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue7
dc.source.volume3
dc.identifier.urlhttp://jss.ecsdl.org/content/3/7/P227/F5.expansion.html
imec.availabilityPublished - imec


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