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Exploring alternative metals to Cu and W for interconnects applications using automated first-principles simulations

dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorClima, Sergiu
dc.contributor.authorMees, Maarten
dc.contributor.authorPourtois, Geoffrey
dc.date.accessioned2021-10-22T05:27:21Z
dc.date.available2021-10-22T05:27:21Z
dc.date.issued2014
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24477
dc.sourceIIOimport
dc.titleExploring alternative metals to Cu and W for interconnects applications using automated first-principles simulations
dc.typeJournal article
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorMees, Maarten
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecMees, Maarten::0000-0001-7217-5510
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewyes
dc.source.beginpageN3127
dc.source.endpageN3133
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/cgi/content/abstract/4/1/N3127
imec.availabilityPublished - imec


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