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Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits

dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-22T05:41:17Z
dc.date.available2021-10-22T05:41:17Z
dc.date.issued2014
dc.identifier.issn0030-4018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24507
dc.sourceIIOimport
dc.titleDeposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits
dc.typeJournal article
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.source.peerreviewyes
dc.source.beginpage210
dc.source.endpage216
dc.source.journalOptics Communications
dc.source.volume313
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0030401813009504
imec.availabilityPublished - imec


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