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Epitaxial staircase structure for the calibration of electrical characterization techniques

dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMcMurray, J. S.
dc.contributor.authorKim, J.
dc.contributor.authorWilliams, C. C.
dc.contributor.authorClark, J. G.
dc.contributor.authorNeubauer, G.
dc.date.accessioned2021-09-30T11:34:51Z
dc.date.available2021-09-30T11:34:51Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2451
dc.sourceIIOimport
dc.titleEpitaxial staircase structure for the calibration of electrical characterization techniques
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage394
dc.source.endpage400
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume16
imec.availabilityPublished - open access


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