Show simple item record

Qualification of spreading resistance probe operations

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:34:59Z
dc.date.available2021-09-30T11:34:59Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2452
dc.sourceIIOimport
dc.titleQualification of spreading resistance probe operations
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage260
dc.source.endpage271
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume16
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
2314.pdf
Size:
197.7Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record