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Role of ambient composition on the formation and shape of watermarks on a bare silicon substrate

dc.contributor.authorTamaddon, Amir-Hossein
dc.contributor.authorMertens, Paul
dc.contributor.authorVermant, Jan
dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T06:22:15Z
dc.date.available2021-10-22T06:22:15Z
dc.date.issued2014
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24591
dc.sourceIIOimport
dc.titleRole of ambient composition on the formation and shape of watermarks on a bare silicon substrate
dc.typeJournal article
dc.contributor.imecauthorTamaddon, Amir-Hossein
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecTamaddon, Amir-Hossein::0000-0003-4566-0697
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpageN3081
dc.source.endpageN3086
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume3
dc.identifier.urlRole of ambient composition on the formation and shape of watermarks on a bare silicon substrate
imec.availabilityPublished - imec


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