Optimized diode analysis of electrical silicon substrate properties
dc.contributor.author | Czerwinski, A. | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Klima, K. | |
dc.contributor.author | Tomaszewski, D. | |
dc.contributor.author | Gibki, J. | |
dc.contributor.author | Katcki, J. | |
dc.date.accessioned | 2021-09-30T11:38:03Z | |
dc.date.available | 2021-09-30T11:38:03Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2471 | |
dc.source | IIOimport | |
dc.title | Optimized diode analysis of electrical silicon substrate properties | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2107 | |
dc.source.endpage | 2112 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 6 | |
dc.source.volume | 145 | |
imec.availability | Published - open access |