Show simple item record

Effect of hydrogenation on misfit dislocations in SiGe/Si structures

dc.contributor.authorDaami, A.
dc.contributor.authorBremond, G.
dc.contributor.authorCaymax, Matty
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-09-30T11:38:22Z
dc.date.available2021-09-30T11:38:22Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2473
dc.sourceIIOimport
dc.titleEffect of hydrogenation on misfit dislocations in SiGe/Si structures
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1737
dc.source.endpage1739
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume16
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
2439.pdf
Size:
166.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record