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Growth and integration challenges for carbon nanotubes interconnects

dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVereecken, Philippe
dc.contributor.authorvan der Veen, Marleen
dc.date.accessioned2021-10-22T07:36:57Z
dc.date.available2021-10-22T07:36:57Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24743
dc.sourceIIOimport
dc.titleGrowth and integration challenges for carbon nanotubes interconnects
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage188
dc.source.endpage193
dc.source.journalMicroelectronic Engineering
dc.source.volume120
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713006199
imec.availabilityPublished - open access


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