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In-situ scanning electron microscopy study of fracture events during BEOL microbeam bending tests

dc.contributor.authorVanstreels, Kris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorBender, Hugo
dc.contributor.authorGonzalez, Mario
dc.contributor.authorLefebvre, J.
dc.contributor.authorBhowmick, S.
dc.date.accessioned2021-10-22T07:39:04Z
dc.date.available2021-10-22T07:39:04Z
dc.date.issued2014
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24747
dc.sourceIIOimport
dc.titleIn-situ scanning electron microscopy study of fracture events during BEOL microbeam bending tests
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage213102
dc.source.journalApplied Physics Letters
dc.source.issue21
dc.source.volume105
dc.identifier.urlhttp://dx.doi.org/10.1063/1.4902516
imec.availabilityPublished - imec


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