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Delivering new liquid metalorganic precursors into silicon Epi and CVD

dc.contributor.authorWoelk, Egbert
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-22T08:21:49Z
dc.date.available2021-10-22T08:21:49Z
dc.date.issued2014-12
dc.identifier.issn0038-111X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24826
dc.sourceIIOimport
dc.titleDelivering new liquid metalorganic precursors into silicon Epi and CVD
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage37
dc.source.endpage40
dc.source.journalSolid State Technology
dc.source.issueDec
dc.identifier.urlhttp://electroiq.com/wp-content/uploads/magazines/sst_nov-dec_de.pdf
imec.availabilityPublished - imec


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