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Advanced interconnects: materials, processing, and reliability

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorZhao, Larry
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T18:31:28Z
dc.date.available2021-10-22T18:31:28Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24962
dc.sourceIIOimport
dc.titleAdvanced interconnects: materials, processing, and reliability
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageY1
dc.source.endpageY4
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/content/4/1/Y1?etoc
imec.availabilityPublished - open access


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