dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-22T18:44:20Z | |
dc.date.available | 2021-10-22T18:44:20Z | |
dc.date.issued | 2015 | |
dc.identifier.issn | 1862-6300 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25097 | |
dc.source | IIOimport | |
dc.title | Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing | |
dc.type | Journal article | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 506 | |
dc.source.endpage | 511 | |
dc.source.journal | Physica Status Solidi A | |
dc.source.issue | 3 | |
dc.source.volume | 212 | |
dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/pssa.201400111/abstract | |
imec.availability | Published - imec | |