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Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing

dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T18:44:20Z
dc.date.available2021-10-22T18:44:20Z
dc.date.issued2015
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25097
dc.sourceIIOimport
dc.titleNano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewyes
dc.source.beginpage506
dc.source.endpage511
dc.source.journalPhysica Status Solidi A
dc.source.issue3
dc.source.volume212
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201400111/abstract
imec.availabilityPublished - imec


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