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Mechanical stress management using micro-Raman spectroscopy

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T11:45:27Z
dc.date.available2021-09-30T11:45:27Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2513
dc.sourceIIOimport
dc.titleMechanical stress management using micro-Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage13
dc.source.endpage17
dc.source.journalMicrosystem Technologies
dc.source.issue1
dc.source.volume5
imec.availabilityPublished - open access


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