Quantification of nanospreading resistance profiling data
dc.contributor.author | De Wolf, Peter | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-09-30T11:45:46Z | |
dc.date.available | 2021-09-30T11:45:46Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2515 | |
dc.source | IIOimport | |
dc.title | Quantification of nanospreading resistance profiling data | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 320 | |
dc.source.endpage | 326 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 1 | |
dc.source.volume | 16 | |
imec.availability | Published - open access |