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Low weight spreading resistance profiling of ultrashallow dopant profiles

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-09-30T11:45:57Z
dc.date.available2021-09-30T11:45:57Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2516
dc.sourceIIOimport
dc.titleLow weight spreading resistance profiling of ultrashallow dopant profiles
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage401
dc.source.endpage405
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume16
imec.availabilityPublished - open access


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