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Compact thermally actuated latching MEMS switch with large contact force

dc.contributor.authorDellaert, Dries
dc.contributor.authorDoutreloigne, Jan
dc.date.accessioned2021-10-22T18:58:09Z
dc.date.available2021-10-22T18:58:09Z
dc.date.issued2015
dc.identifier.issn0013-5194
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25185
dc.sourceIIOimport
dc.titleCompact thermally actuated latching MEMS switch with large contact force
dc.typeJournal article
dc.contributor.imecauthorDoutreloigne, Jan
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage80
dc.source.endpage81
dc.source.journalElectronics Letters
dc.source.issue1
dc.source.volume51
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7006862
imec.availabilityPublished - open access


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