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Two-dimensional profiling of InP structures using scanning spreading resistance microscopy

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorGeva, M.
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBylsma, R. B.
dc.date.accessioned2021-09-30T11:46:19Z
dc.date.available2021-09-30T11:46:19Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2518
dc.sourceIIOimport
dc.titleTwo-dimensional profiling of InP structures using scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2155
dc.source.endpage2157
dc.source.journalApplied Physics Letters
dc.source.issue15
dc.source.volume73
imec.availabilityPublished - open access


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