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Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication

dc.contributor.authorDoise, Jan
dc.contributor.authorBekaert, Joost
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorCao, Yi
dc.contributor.authorHong, Sung Eun
dc.contributor.authorLin, Guanyang
dc.contributor.authorFishman, Daniel
dc.contributor.authorChakk, Yuli
dc.contributor.authorMarzook, Taisir
dc.date.accessioned2021-10-22T19:04:26Z
dc.date.available2021-10-22T19:04:26Z
dc.date.issued2015
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25218
dc.sourceIIOimport
dc.titleImplementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
dc.typeJournal article
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewyes
dc.source.beginpage06F301
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume33
dc.identifier.urlhttp://dx.doi.org/10.1116/1.4929884
imec.availabilityPublished - imec


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