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Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: towards integrated active nanophotonic devices

dc.contributor.authorGeorge, J.P
dc.contributor.authorSmet, P.F.
dc.contributor.authorBotterman, J.
dc.contributor.authorBliznuk, V.
dc.contributor.authorWoestenborghs, Wouter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorNeyts, K.
dc.contributor.authorBeeckman, J.
dc.date.accessioned2021-10-22T19:23:33Z
dc.date.available2021-10-22T19:23:33Z
dc.date.issued2015-06
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25309
dc.sourceIIOimport
dc.titleLanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: towards integrated active nanophotonic devices
dc.typeJournal article
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage13350
dc.source.endpage13359
dc.source.journalACS Applied Materials & Interfaces
dc.source.volume7
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/acsami.5b01781
imec.availabilityPublished - open access


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