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Defect-induced bandgap narrowing in low-k dielectrics

dc.contributor.authorGuo, X
dc.contributor.authorZheng, H
dc.contributor.authorKing, S
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorNishi, Y.
dc.contributor.authorShohet, J.
dc.date.accessioned2021-10-22T19:33:34Z
dc.date.available2021-10-22T19:33:34Z
dc.date.issued2015
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25349
dc.sourceIIOimport
dc.titleDefect-induced bandgap narrowing in low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.source.peerreviewyes
dc.source.beginpage82903
dc.source.journalApplied Physics Letters
dc.source.issue8
dc.source.volume107
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/107/8/10.1063/1.4929702
imec.availabilityPublished - imec


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