dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Tsigkourakos, Menelaos | |
dc.contributor.author | Kluge, Julia | |
dc.contributor.author | Werner, Thilo | |
dc.contributor.author | Zha, Lichen | |
dc.contributor.author | Paredis, Kristof | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Nuytten, Thomas | |
dc.contributor.author | Xu, Blair | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-22T19:36:37Z | |
dc.date.available | 2021-10-22T19:36:37Z | |
dc.date.issued | 2015 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25361 | |
dc.source | IIOimport | |
dc.title | Overcoated diamond tips for nanometer-scale semiconductor device characterization | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Zha, Lichen | |
dc.contributor.imecauthor | Paredis, Kristof | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Nuytten, Thomas | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.contributor.orcidimec | Paredis, Kristof::0000-0002-5163-4164 | |
dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 5 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 141 | |
dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0167931714005206 | |
imec.availability | Published - imec | |