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Metal gate work function engineering for future CMOS technology node

dc.contributor.authorLima, Lucas Petersen Barbosa
dc.date.accessioned2021-10-22T20:36:16Z
dc.date.available2021-10-22T20:36:16Z
dc.date.issued2015-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25561
dc.sourceIIOimport
dc.titleMetal gate work function engineering for future CMOS technology node
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorDiniz, Jose
dc.contributor.thesisadvisorDe Gendt, Stefan
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1723954&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US
imec.availabilityPublished - imec


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