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Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

dc.contributor.authorMannarino, Manuel
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMoussa, Alain
dc.contributor.authorMerckling, Clement
dc.contributor.authorEyben, Pierre
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T20:51:09Z
dc.date.available2021-10-22T20:51:09Z
dc.date.issued2015
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25605
dc.sourceIIOimport
dc.titleSurface characterization of InP trenches embedded in oxide using scanning probe microscopy
dc.typeJournal article
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage225304
dc.source.journalJournal of Applied Physics
dc.source.issue22
dc.source.volume118
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/118/22/10.1063/1.4936895
imec.availabilityPublished - open access


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