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dc.contributor.authorMitsukura, Kazuyuki
dc.contributor.authorSaisyo, Ryouta
dc.contributor.authorMakino, Tatsuya
dc.contributor.authorHatakeyama, Keiichi
dc.contributor.authorMinegishi, Tomonori
dc.contributor.authorWang, Teng
dc.contributor.authorDaily, Robert
dc.contributor.authorDuval, Fabrice
dc.contributor.authorRebibis, Kenneth June
dc.contributor.authorMiller, Andy
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-22T21:08:47Z
dc.date.available2021-10-22T21:08:47Z
dc.date.issued2015
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25653
dc.sourceIIOimport
dc.titleDevelopment and evaluation of photodefinable wafer level underfill
dc.typeJournal article
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorRebibis, Kenneth June
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.beginpage229
dc.source.endpage232
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.issue2
dc.source.volume28
dc.identifier.urlhttps://www.jstage.jst.go.jp/article/photopolymer/28/2/28_229/_article
imec.availabilityPublished - imec
imec.internalnotes31st International Conference of Photopolymer Science and Technology, Materials & Processes for Advanced Micro-lithography, Nano ...


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