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Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

dc.contributor.authorNag, Manoj
dc.contributor.authorMuller, Robert
dc.contributor.authorSteudel, Soeren
dc.contributor.authorSmout, Steve
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorMyny, Kris
dc.contributor.authorSchols, Sarah
dc.contributor.authorGenoe, Jan
dc.contributor.authorCobb, Brian
dc.contributor.authorKumar, Abhishek
dc.contributor.authorGelinck, Gerwin
dc.contributor.authorFukui, Yusuke
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.date.accessioned2021-10-22T21:19:55Z
dc.date.available2021-10-22T21:19:55Z
dc.date.issued2015
dc.identifier.issn1598-0316
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25683
dc.sourceIIOimport
dc.titleLow-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs
dc.typeJournal article
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorSmout, Steve
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorSchols, Sarah
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecSmout, Steve::0000-0001-5464-8951
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.source.peerreviewyes
dc.source.beginpage111
dc.source.endpage117
dc.source.journalJournal of Information Display
dc.source.issue2
dc.source.volume16
dc.identifier.urlhttp://www.tandfonline.com/doi/abs/10.1080/15980316.2015.1043359#.VYLLAk0w99A
imec.availabilityPublished - imec


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