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Scanning Spreading Resistance Microscopy for TCAD calibration in CMOS technologies

dc.contributor.authorNazir, Aftab
dc.date.accessioned2021-10-22T21:22:27Z
dc.date.available2021-10-22T21:22:27Z
dc.date.issued2015-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25690
dc.sourceIIOimport
dc.titleScanning Spreading Resistance Microscopy for TCAD calibration in CMOS technologies
dc.typePHD thesis
dc.contributor.imecauthorNazir, Aftab
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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