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dc.contributor.authorPeter, Antony
dc.contributor.authorMartens, Koen
dc.contributor.authorRampelberg, Geert
dc.contributor.authorToeller, Michael
dc.contributor.authorAblett, James
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorCuypers, Daniel
dc.contributor.authorFranquet, Alexis
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorReuff, Jean-Pascal
dc.contributor.authorSchaekers, Marc
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorRadu, Iuliana
dc.date.accessioned2021-10-22T21:46:57Z
dc.date.available2021-10-22T21:46:57Z
dc.date.issued2015
dc.identifier.issn1616-301X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25752
dc.sourceIIOimport
dc.titleMetal-insulator transition in ALD VO2 ultrathin films and nanoparticles: morphological control
dc.typeJournal article
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewyes
dc.source.beginpage679
dc.source.endpage686
dc.source.journalAdvanced Functional Materials
dc.source.issue5
dc.source.volume25
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/adfm.201402687/abstract
imec.availabilityPublished - imec


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