Show simple item record

Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures

dc.contributor.authorProshina, O.
dc.contributor.authorRakhimova, T.
dc.contributor.authorLopaev, D.
dc.contributor.authorSamara, V.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-22T21:57:01Z
dc.date.available2021-10-22T21:57:01Z
dc.date.issued2015
dc.identifier.issn0963-0252
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25777
dc.sourceIIOimport
dc.titleExperimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.source.peerreviewyes
dc.source.beginpage55006
dc.source.journalPlasma Sources Science and Technology
dc.source.issue5
dc.source.volume24
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/0963-0252/24/5/055006/meta
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record