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Hexagonal hole array patterning for memory applications

dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T22:56:42Z
dc.date.available2021-10-22T22:56:42Z
dc.date.issued2015
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25915
dc.sourceIIOimport
dc.titleHexagonal hole array patterning for memory applications
dc.typeJournal article
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewyes
dc.source.beginpage623
dc.source.endpage629
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.issue5
dc.source.volume28
dc.identifier.urlhttp://doi.org/10.2494/photopolymer.28.623
imec.availabilityPublished - imec


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