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Suppression of boron incorporation at the early growth phases of boron-doped diamond thin films

dc.contributor.authorTsigkourakos, Menelaos
dc.contributor.authorHantschel, Thomas
dc.contributor.authorXu, Zheng
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorZou, Yiming
dc.contributor.authorLarsson, Karin
dc.contributor.authorBoman, Mats
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T23:44:27Z
dc.date.available2021-10-22T23:44:27Z
dc.date.issued2015
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26017
dc.sourceIIOimport
dc.titleSuppression of boron incorporation at the early growth phases of boron-doped diamond thin films
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.beginpage2595
dc.source.endpage2599
dc.source.journalPhysica Status Solidi A
dc.source.issue1
dc.source.volume212
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201532185/abstract
imec.availabilityPublished - imec


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