Show simple item record

Mechanical stability of low-k dielectrics

dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T00:29:08Z
dc.date.available2021-10-23T00:29:08Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26113
dc.sourceIIOimport
dc.titleMechanical stability of low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.source.peerreviewyes
dc.source.beginpageN3058
dc.source.endpageN3064
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/content/4/1/N3058.abstract
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record